Chiheng specializes in CNC machining of high vacuum components for research institutions, semiconductor equipment manufacturers, and industrial system integrators. From vacuum flanges and fittings to complex vacuum system components, we deliver parts that meet strict cleanliness, dimensional, and leak-tightness requirements.
High vacuum systems operate at pressures below 10⁻³ mbar, demanding components with ultra-tight tolerances, smooth surface finishes, and materials that minimize outgassing. High vacuum components include flanges, feedthroughs, chambers, valves, fittings, and custom-machined structural parts — all of which require manufacturing precision that standard machining cannot guarantee.
At Chiheng, we apply aerospace-grade CNC milling, turning, and 5-axis machining to produce vacuum hardware that performs reliably in demanding environments, including semiconductor fab, laboratory research, coating systems, and particle accelerators.
Chiheng machines every component to vacuum-grade tolerances — from single prototypes to production batches of 10,000+. Below are the core product groups we supply to semiconductor fabs, research labs, particle accelerator facilities, and vacuum hardware OEMs worldwide.
We machine custom vacuum chambers from 304/316L stainless steel and aluminum 6061/7075 to suit UHV, HV, and roughing vacuum applications.
What we machine: UHV-compatible test chambers · process chambers · load-lock enclosures · cube, cross, and cylindrical chamber bodies with multiple CF or KF ports · custom multi-port geometries from DXF/STEP/IGES files.
Tolerances: ±0.01 mm on mating faces; Ra ≤ 0.8 µm on sealing surfaces as standard.
Surface finish options: Electropolishing (ASTM A967), passivation, anodizing, bead blasting.
ConFlat-compatible flanges machined with precision knife-edge profiles for leak-free metal-seal connections down to 10⁻¹² mbar.
What we machine: DN16 – DN500 CF flanges · rotatable and fixed flanges · blank flanges · tee and cross CF pieces · non-standard OD/ID to customer drawing.
Key spec: Knife-edge sealing surface Ra ≤ 0.4 µm · angular flatness tolerance ±0.01 mm.
Materials: 304/316L stainless steel · aluminum 6061 (lightweight UHV assemblies).
ISO-KF (QF) quick-release clamp flanges for rough and medium vacuum systems, machined to DIN 28403 / ISO 2861 standards.
What we machine: KF10 – KF50 flanges · ISO-F and ISO-K large-bore flanges · elbows · tees · reducers · custom porting patterns and non-standard configurations.
Key spec: Centering ring groove tolerance ±0.05 mm · face flatness ≤ 0.05 mm.
Materials: 304/316L SS · Al 6061 · PEEK for chemically aggressive process lines.
Cross-standard adapters and fittings that bridge different vacuum flange systems within a single assembly.
What we machine: CF-to-KF reducers · CF-to-NPT fittings · multi-port manifolds · tee / cross / elbow adapters · zero-length reducers · custom transition flanges from DXF/STEP.
Key spec: Dual sealing surface compatibility; all ports helium leak-tested on request (specify at inquiry).
MOQ: From 1 piece — ideal for R&D rig builds and prototype systems.
Precision-bored housings designed to maintain vacuum integrity while passing electrical signals, fluids, optical fibers, or mechanical motion through the chamber wall.
What we machine: CF flange-mounted feedthrough bodies · multi-pin electrical housings · thermocouple port blocks · fiber optic feedthrough flanges · rotary and linear motion feedthrough housings.
Key spec: Bore concentricity ±0.005 mm · hermetic-grade surface finish on port bore walls.
Typical applications: Particle accelerators · PVD/CVD thin-film systems · mass spectrometers · scientific research instruments.
Structural bodies, seat rings, disc elements, and actuation parts for gate valves, angle valves, butterfly valves, and needle valves.
What we machine: Gate valve bodies · butterfly valve discs · angle valve housings · manual and pneumatic actuator bodies · valve seat rings · bonnet assemblies.
Key spec: Seat surface Ra ≤ 0.4 µm · bore roundness ±0.003 mm on critical sealing bores.
Supplied to: Vacuum hardware OEMs · semiconductor equipment integrators · industrial vacuum furnace manufacturers.
Precision-ground and polished sealing faces machined to the surface finish specifications required by metal, elastomer, and specialty gasket seal systems.
What we machine: O-ring groove faces · copper gasket seating surfaces · knife-edge profiles on custom flanges · flat metal gasket faces · taper-seal cone surfaces.
Key spec: CF sealing surface Ra ≤ 0.4 µm standard; Ra ≤ 0.2 µm available on request · flatness ±0.01 mm · electropolishing to ASTM A967.
QC documentation: Dimensional inspection report + surface finish record included with every shipment — ready for incoming QC.
Selecting the right material is critical to maintaining vacuum integrity and minimizing outgassing. Chiheng works with the following materials for vacuum applications:
| Material | Application | Advantage |
|---|---|---|
| Stainless Steel 316L | Flanges, chambers, fittings | Low outgassing, corrosion-resistant |
| Aluminum 6061 / 7075 | Structural components, adapters | Lightweight, machinable |
| Titanium | High-strength vacuum parts | Excellent vacuum compatibility |
| PEEK / PTFE | Electrical isolators, seals | Low outgassing polymer |
| Copper (OFC) | Gaskets, feedthroughs | Excellent thermal conductivity |
Our 3-axis, 4-axis, and 5-axis CNC machining centers hold tolerances to ±0.005 mm on critical vacuum mating surfaces — essential for leak-free assemblies.
We offer electropolishing, passivation (ASTM A967), bead blasting, and anodizing. All vacuum components are cleaned with ultrasonic degreasing and sealed in clean packaging to prevent contamination.
Prototype vacuum components are typically delivered in 7–15 business days. We support quantities from 1 piece to 10,000+ pieces, making Chiheng a flexible partner for both R&D and production scale.
Each shipment includes dimensional inspection reports, material certifications (Mill Test Reports), and surface finish records — ready for your incoming QC.
We machine components suitable for rough vacuum (>1 mbar), high vacuum (10⁻³ to 10⁻⁷ mbar), and ultra-high vacuum (<10⁻⁷ mbar) systems, depending on material selection and surface finish specification.
Yes. We work from customer drawings (DXF, DWG, STEP, IGES) and can machine flanges, fittings, and adapters to any custom specification.
We can arrange helium leak testing and pressure testing for components where vacuum integrity is critical. Please specify this requirement at inquiry stage.
Knife-edge sealing surfaces for CF flanges are machined to Ra ≤ 0.4 μm and dimensional tolerances of ±0.01 mm as standard. Tighter tolerances are available on request.
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Whether it’s a small batch of complex components or mass production of standardized parts, Chiheng is fully equipped to handle diverse manufacturing demands with agility and precision.
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